Graphite Susceptors
Our graphite susceptors are manufactured from our proprietary high-purity(≤1 ppm impurities) graphite materials, ensuring uniform heat distribution and excellent thermal stability in MOCVD and CVD epitaxy systems. These components withstand extreme temperatures and chemical exposure, minimizing contamination risks. To further enhance performance, we offer Tantalum Carbide (TaC) and Silicon Carbide (SiC) coatings, which improve resistance to oxidation, corrosion, and precursor gas reactions, significantly extending susceptor lifespan. We supply SiC/TaC coated susceptors for all current epitaxy reactors, including barrel susceptors, pancake susceptors, and single-wafer susceptors in different sizes.
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132 Chief Justice Cushing Hwy, Unit 70， Cohasset， MA 02025, USA
