SiC/TaC-Coated Graphite

In semiconductor, photovoltaic, chemical, and other high-temperature industrial applications, specialty graphite components offer exceptional thermal stability and conductivity. However, to further enhance oxidation resistance, corrosion resistance, and service life, Graphite Matrix provides dense and wear-resistant silicon carbide (SiC) and tantalum carbide (TaC) coatings, ensuring outstanding performance in extreme environments, thus reducing overall operating costs for our custmers.

GRAPHITEMATRIX Silicon Carbide (SiC) Coating: High-Temperature & Corrosion Resistance

Graphite Matrix’s SiC coating is applied using Chemical Vapor Deposition (CVD) technology, delivering superior protection in high-temperature and corrosive environments. Its unique microstructure and precisely engineered deposition process make it the preferred choice for semiconductor crystal growth, SiC epitaxy, and photovoltaic applications.

Key Features

Customizable Coating Grain Structure

The coating features a grain size of 10-20μm with the ability to uniformly arrange grains of varying sizes according to specific customer requirements.

High Purity

Our SiC coating boasts high purity with an ash content of <5ppm, ensuring compliance with stringent semiconductor and high-tech industry standards.

Precision Masking Capability

Selective coating can be applied as per customer requirements, enabling masked coating processes that allow for partial coating areas in specialized applications.

High Uniformity & Low Surface Roughness

With a surface roughness of 2-10μm and a standard thickness of 100μm (tolerances controlled within ±15μm), our coatings do not require secondary polishing, meeting the rigorous demands of precision applications.

Industry-Leading “Support-Free” Coating Technology

Our advanced deposition technique enables single-process coating formation without the need for secondary masking on support points, ensuring superior coating integrity.

Comprehensive Quality Control & Testing

Our coatings undergo stringent quality assurance processes, including:

Purity analysis
Thickness measurement
Adhesion testing
Room-temperature and high-temperature pull-off tests

Additionally, we support any customer-specified inspections to ensure full compliance with their requirements.

GraphiteMatrix TaC Coating (TaC): Ultra High-Temperature & Corrosion Resistance

With a melting point of 3,880°C, TaC is one of the most temperature-resistant coatings available, making it ideal for extreme thermal applications such as etching systems and aerospace components. Graphite Matrix offers tantalum carbide (TaC) coatings designed for applications demanding extreme corrosion resistance and thermal stability.

Key Features

CVD-Based Deposition

Our TaC coating is applied using CVD technology to achieve a coating thickness of 20-50μm, providing chemical inertness under high-temperature exposure to ammonia (NH₃), hydrogen (H₂), and hydrogen chloride (HCl) atmospheres.

Ultra-High Purity

The coating maintains ultra-high purity with an ash content of <5ppm, ensuring it meets the strict standards of the semiconductor and high-tech industries.

Exceptional Thermal Stability & Extended Service Life

Our TaC coatings offer exceptional thermal stability and an extended service life, minimizing delamination and outperforming conventional coatings in demanding environments.