Graphite Boats
The graphite boat is a high-performance container made from premium graphite materials, designed for stable operation in extreme high-temperature environments. With excellent thermal conductivity, chemical stability, and mechanical strength, it is widely used to carry and support silicon wafers or other materials during thermal processing. Available in two main types—graphite groove boats and thin graphite boats—it meets diverse industrial needs. Groove boats are ideal for vacuum furnace sintering, offering large capacity and uniform heating for mass production. Thin graphite boats provide rapid thermal response, precise temperature control, and reduced heat loss, making them suitable for processes with tight space or high heating accuracy requirements.
Graphite boats exhibit outstanding resistance to temperatures above 2000°C and demonstrate strong corrosion resistance to acids, alkalis, and chemical salts. Their high thermal conductivity ensures efficient and even heat transfer, while their durability supports long service life under thermal cycling. These features make graphite boats essential in semiconductor fabrication, solar cell production, PECVD processes, lithium battery material treatment, chemical reaction systems, and vacuum furnace operations. Enhanced composite options, such as epoxy-reinforced graphite structures, further improve load-bearing and corrosion resistance for demanding applications.
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