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Graphite Matrix LLC
Address: 6 Liberty Square PMB # 502 Boston, MA 02109
E-Mail: shuxinyang@graphitematrix.com
Tel: +1 314-814-9968

Graphite susceptor

Graphite susceptors provide high purity, excellent thermal conductivity, uniform heating, and stable performance in semiconductor and high-temperature processing systems.
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Graphite Susceptors

Graphite Susceptors

Our graphite susceptors are manufactured from our proprietary high-purity(≤1 ppm impurities) graphite materials, ensuring uniform heat distribution and excellent thermal stability in MOCVD and CVD epitaxy systems. These components withstand extreme temperatures and chemical exposure, minimizing contamination risks. To further enhance performance, we offer Tantalum Carbide (TaC) and Silicon Carbide (SiC) coatings, which improve resistance to oxidation, corrosion, and precursor gas reactions, significantly extending susceptor lifespan. We supply SiC/TaC coated susceptors for all current epitaxy reactors, including barrel susceptors, pancake susceptors, and single-wafer susceptors in different sizes.

Graphite Susceptors for CVD and Epitaxy: Advancing High-Performance Materials

Graphite Susceptors for CVD and Epitaxy: Advancing High-Performance Materials

Graphite susceptors in CVD and epitaxy are crucial for uniform heating, thermal stability, and chemical inertness, supporting high-quality semiconductor manufacturing.