Next-Generation SiC and TaC Coating

At Graphite Matrix, we have developed a CVD coating system that enables industry-leading performance in Silicon Carbide (SiC) and Tantalum Carbide (TaC) coated graphite components. Our advanced coating process ensures that the impurity of our coated graphite products reaches below 5 ppm. Our products undergo rigorous quality checks, ensuring that they meet customer requirements. We also provide comprehensive material characterization, including surface morphology, grain size, post-coating hardness, roughness, thickness, GD-MS (Glow Discharge Mass Spectrometry), and ICP-MS (Inductively Coupled Plasma Mass Spectrometry).  

 

Our Silicon Carbide (SiC) Coating Technology

 

Before a wafer can be used in electronic devices, it must go through several critical processing steps, with silicon epitaxy being one of the most critical. In this process, a thin, high-purity crystalline layer is deposited onto a silicon wafer to enhance its electrical properties. The wafers are supported by graphite susceptors inside high-temperature CVD reactors, where the quality and properties of these susceptors play a crucial role in determining the uniformity, purity, and overall performance of the epitaxial layer. 

 

Our SiC- coated graphite susceptors offer exceptional purity, homogeneous coating, and an extended service life. The coating grain structure is optimized with a particle size ranging between 10-20μm, and we can evenly arrange different grain sizes based on customer requirements. Furthermore, we offer selective coating services, applying SiC only where required.  

 

Our coating surface roughness ranges from 2-10μm, with a final coating thickness of 100μm ± 15μm. The advanced coating process ensures a smooth and uniform surface, avoiding the need for secondary polishing or machining. A major breakthrough in our process is the industry-leading Non-Fixtured Coating Technology, which enables a single-step application ensuring full coverage without the need for additional masking or fixture adjustments. This innovation results in a seamless, defect-free coating surface. To maintain the highest quality standards, our coatings undergo strict quality inspections, including thickness measurement, and pull-off adhesion tests. 

 

Tantalum Carbide (TaC) Coating Technology 

 

Tantalum carbide is known for its exceptional hardness and high melting point, exceeding 3,800°C, making it ideal for applications that require superior wear resistance and extreme temperature tolerance. Industries such as aerospace, semiconductors, and high-temperature manufacturing rely on CVD TaC coatings to extend the lifespan of critical components while reducing maintenance costs and improving operational efficiency. The protective barrier formed by TaC coatings enhances heat resistance, mechanical strength, and contamination prevention, making it an invaluable solution for extreme heat, pressure, and chemical exposure. With a coating thickness ranging from 20-50μm, our TaC provides exceptional chemical resistance, demonstrating stability against ammonia (NH₃), hydrogen (H₂), and hydrogen chloride (HCl) at high temperatures. 

 

Explore Our Advanced Coating Solutions 

 

At Graphite Matrix, we continuously develop and refine our materials in collaboration with semiconductor manufacturers. Our advanced SiC- and TaC- coated graphite components are designed to enhance epitaxy efficiency, delivering high precision, purity, and extended component lifespan. Meanwhile, these coated graphite components provide superior thermal stability and chemical resistance, ensuring reliable performance in extreme environments. 

 

For more details on high-purity graphite susceptors for silicon epitaxy or advanced carbide coatings, our team is here to help you find the best solution to enhance performance, longevity, and process stability.